Article ID Journal Published Year Pages File Type
540904 Microelectronic Engineering 2006 5 Pages PDF
Abstract

Secondary electron images at low landing energies (below 50 eV) are presented by a portable field emission scanning electron microscope. The results show that nanoscale images of resolution better than 20 nm can be obtained on a nylon-fibre specimen at landing energies as low as 1 eV. Preliminary simulation results predict that the image resolution should be much higher.

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Physical Sciences and Engineering Computer Science Hardware and Architecture
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