Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
540904 | Microelectronic Engineering | 2006 | 5 Pages |
Abstract
Secondary electron images at low landing energies (below 50 eV) are presented by a portable field emission scanning electron microscope. The results show that nanoscale images of resolution better than 20 nm can be obtained on a nylon-fibre specimen at landing energies as low as 1 eV. Preliminary simulation results predict that the image resolution should be much higher.
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Authors
Anjam Khursheed, Karuppiah Nelliyan, Yu Ding,