Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
540912 | Microelectronic Engineering | 2006 | 4 Pages |
Abstract
An ion beam imprinting system has been developed in Lawrence Berkeley National Laboratory. In order to push ion beam imprinting technology to nanometer regime, it is very important to fabricate membranes with arrays of apertures only a few nanometers in diameter. In this article, we describe a simple method of forming nanopore arrays by simultaneously shrinking apertures of micrometer dimensions using plasma-assisted thin-film deposition. Nanopores of 13 nm in diameter and nanoslits of 20 nm in width have been fabricated.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Qing Ji, Ye Chen, Lili Ji, Ximan Jiang, Ka-Ngo Leung,