| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 541099 | Microelectronic Engineering | 2016 | 4 Pages |
•Design of photonic band gap nanobeam cavities•Theoretical study on photonic crystal nanobeams (PhCNB) in air-bridge silicon nitride structures•Electron beam lithography•Fabrication of silicon nitride nanobeams
We report on the design, theoretical simulations and fabrication details of photonic crystal nanobeams (PhCNB) in air-bridge silicon nitride structures. The PhC nanobeams consist of a one-dimensional photonic crystal lattice of circular air holes. The design of structures that show band gaps for the waveguide modes will allow the creation of suspended photonic nanobeam cavities in a second step. The silicon nitride layer is deposited on top of a thermally oxidized silicon wafer with LPCVD followed by e-beam lithography and proper wet etching to release the suspended structures.
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