Graphene transfer methods for the fabrication of membrane-based NEMS devices

•Investigation of CVD graphene transfer methods for fabricating suspended membranes•Development of a method to stack layer-by-layer graphene to improve stability of the membranes•Successful fabrication and electrical characterization of graphene based pressure sensor•Scalable and large-area fabrication of graphene membrane based NEMS devices

Graphene has extraordinary mechanical and electronic properties, making it a promising material for membrane based nanoelectromechanical systems (NEMS). Here, three methods for direct transfer of chemical vapor deposited graphene onto pre-fabricated micro cavity substrates were investigated and analyzed with respect to yield and quality of the free-standing membranes on a large-scale. An effective transfer method for layer-by-layer stacking of graphene was developed to improve the membrane stability and thereby increase the yield of completely covered and sealed cavities. The transfer method with the highest yield was used to fabricate graphene NEMS devices. Electrical measurements were carried out to successfully demonstrate pressure sensing as a possible application for these graphene membranes.

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