| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 541153 | Microelectronic Engineering | 2016 | 5 Pages |
•NanoFET system for the detection of negative ions in air•Analysis of real-time response of nanoFET to the adsorption of negative ions•Hand-held nanoFET system can monitor the operation of ion generator.
In this study, we first demonstrate the quantitative detection of negative ions in air using a nano field-effect transistor (nanoFET). We propose an airborne anion-detecting sensor using a nanoFET suitable for a very small, low-cost device for detecting ions in air. We fabricated such a nanoFET device and evaluated its anion detection characteristics in air. The conductance change of the FET channel induced by the adsorption of airborne negative ions on the floating gate of the nanoFET device was measured in real time. The detection sensitivity of the nanoFET was evaluated by comparison with the measurement results of a conventional airborne ion counter. We then implemented a small, low-cost device for detecting air anions using a nanoFET sensor, circuits to drive the back-gate voltage and read out conductance changes, and a digital microprocessor.
Graphical abstractDetecting anions in air using a nano field-effect transistor (nanoFET).Figure optionsDownload full-size imageDownload as PowerPoint slide
