| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 541439 | Microelectronic Engineering | 2010 | 4 Pages |
Abstract
This paper deals with the study of spin coating processes for the deposition of polysiloxane-based thin films. Specific developments are proposed in order to adapt the hydrodynamic laws theory to the spin coating of Maxwellian liquids. Theoretical and experimental results are compared, evidencing a good fit and enabling to define the Maxwellian law for the studied polysiloxane polymer. Finally, the theoretical developments are successfully extended to the BCB 4026 and SU-8 3050 photosensitive resins.
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Authors
P. Temple-Boyer, L. Mazenq, J.B. Doucet, V. Conédéra, B. Torbiéro, J. Launay,