Article ID Journal Published Year Pages File Type
541517 Microelectronic Engineering 2009 4 Pages PDF
Abstract

Roller embossing has attracted more attention in recent years due to its rapid and continuous process for mass production. The fabrication of roller is a challenge due to microstructures on the curved surface. This paper proposes a method of fabricating roller mold with microstructures on the surface using novel stepped rotating lithography and electroless nickel plating. The results prove that the microstructures can be successfully fabricated onto the metal roller using the proposed procedure. In this study, the roller with micro-grooves whose average height is 1.1 μm and widths are 23 and 45 μm have been successfully fabricated.

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