Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
541553 | Microelectronic Engineering | 2009 | 5 Pages |
Abstract
We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 μm were fabricated through double-exposure deep X-ray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed.
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Authors
Marco Matteucci, M. Fanetti, M. Casella, F. Gramatica, L. Gavioli, M. Tormen, G. Grenci, F. De Angelis, E. Di Fabrizio,