Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
541897 | Microelectronic Engineering | 2006 | 5 Pages |
Abstract
50 nm films Ag–(0.3–1 at.% W)–oxygen deposited by electroless onto Pd activated SiO2/Si show fast, low activation energy decay of their electrical resistivity ρ after annealing above the threshold temperature T∗ = 90 ± 10 °C. The decrease in ρ was attributed in our previous works to surface diffusion controlled sintering. In attempt to understand the mechanism of this interesting effect we studied further the origin of open porosity, W segregation, evolution of the tungstate phase Ag2W2O7 at the internal interfaces and temporal evolution of surface roughness in the course of annealing. A possible role of the tungstate phase transition to super ion conductive state in the diffusion mobility of Ag is speculated.
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Authors
E. Glickman, A. Inberg, G. Aviram, R. Popovitz, N. Croitoru, Y. Shacham-Diamand,