Article ID Journal Published Year Pages File Type
542431 Microelectronic Engineering 2014 4 Pages PDF
Abstract

•New flexible TCO layer for solar cell emitter contact was proposed.•PLD methods was employed for the first time to produce flexible AZO layers for photovoltaic applications, on PET foil.•Comprehensive material, electrical, optical and mechanical characterization of elaborated layers is presented.•The connection between AZO manufacturing parameters, layer structure and usefulness in TCO application is indicated.

The paper presents investigation of aluminum doped zinc oxide (ZnO:Al or AZO) layers in terms of their application as transparent front contacts in flexible photovoltaic cells. Studied ZnO:Al thin films were deposited, for the first time, by using pulsed laser deposition technique (PLD) on PET foil. The essential parameters of obtained AZO transparent conductive layers (TCL), such as optical transmission, resistance per square and mechanical durability, were measured and analyzed. Additionally the composition and structure of manufactured layers were tested by HRSEM, EDX and XRD methods. Direct connections between the beam wavelength, AZO structure and obtained TCO layer were revealed.

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