Article ID Journal Published Year Pages File Type
542608 Microelectronic Engineering 2014 4 Pages PDF
Abstract

•Monolayer graphene resonators have been fabricated with up to 3 mm in length.•Resonators exhibit mechanical stability with ultra high aspect ratio.•Raman spectra proved graphene to be of high quality.•Interferometery profiling of the membranes shows very little sagging.•Resonance frequency can be matched with analytical model for thin membranes.

Graphene resonators have been fabricated in rectangular and circular geometries ranging from 1 to 3 mm in diameter. The resonant frequencies have been measured, and fitted to an analytical model. An optical profile of the graphene sheet has been taken, and the monolayer graphene has been confirmed to be of high quality using Raman spectroscopy. The graphene membranes have shown hookean behaviour with no evidence of deformation. The characterisation of the single layer graphene sheet on this large scale provides new information previously unavailable on the mechanical stability of graphene with ultra high aspect ratio.

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