| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 542848 | Microelectronic Engineering | 2013 | 4 Pages |
Transmission scatterometry is studied as a characterization tool for gratings nanoimprinted in a resist layer spincoated on the top of a transparent substrate. In this case, the larger part of the incident signal is transmitted which can make the reflection analysis harder. Although the backward reflections in the substrate induce an error which is difficult to correct, results are shown to be in good agreement with SEM measurements and reflection mode scatteromerty.
Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► Analysis of resist gratings on quartz substrate fabricated by Nanoimprint lithography. ► Comparison between transmission and reflection scatterometry. ► Reliability check of transmission scatterometry for Nanoimprinted transparent structures.
