Threshold voltage model for accumulation mode polycrystalline SOI MOSFETs and comparisons with experimental results

In this paper, a simple but accurate semi analytical charge sheet model is presented for threshold voltage of accumulation mode polycrystalline silicon on insulator (PSOI) MOSFETs. In this model, we define the threshold voltage (VT) of the polysilicon accumulation mode MOSFET as the gate voltage required to raise the surface potential (ϕs) to a value ϕsT necessary to overcome the charge trapping in the grain boundary and to create channel accumulation charge that is equal to the channel accumulation charge available in the case of single crystal silicon accumulation mode MOSFET at that ϕsT. The correctness of the model is demonstrated by comparing the theoretically estimated values of threshold voltage with the experimentally measured threshold voltages on the accumulation mode PSOI MOSFETs fabricated in the laboratory using LPCVD polysilicon layers doped with boron to achieve dopant densities in the range 3.3 × 1015–5 × 1017/cm3. Further, it is shown that the threshold voltage values of accumulation mode PSOI MOSFETs predicted by the present model match very closely with the experimental results, better than those obtained with the models previously reported in the literature.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► A novel definition of threshold voltage in p-accumulation mode PSOI MOSFETs. ► Semi analytical threshold voltage model based on physical insight. ► Comparison with experimental results and validation of the model.