Organic half-wave rectifier fabricated by stencil lithography on flexible substrate

We demonstrate the feasibility of fabrication method combining classic and stencil lithography for producing simple organic rectifying circuits for use in radio frequency range. Two stencil lithography steps are crucial because pentacene, once deposited on the wafer, cannot survive classic lithography resist removal. The presented rectifier is made of one organic Schottky diode followed by a MIM (Metal–Insulator–Metal) capacitor, integrated on the same flexible substrate. The devices are fabricated on a flexible polyimide foil by two aligned levels of stencil lithography using ALD deposited high-k hafnium-oxide, (HfO2 – experimental κ ∼ 19).

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► A half-wave organic rectifier circuit is presented. ► The rectifier generates the DC supply voltage needed for organic RFID tags. ► Fabrication process is ambitious combination of stencil and classic lithography.