Article ID Journal Published Year Pages File Type
543057 Microelectronic Engineering 2011 9 Pages PDF
Abstract

Porous insulators offer new opportunities for the controlled guest–host synthesis of nanowires for future integrated circuits characterized by low propagation delay, crosstalk and power consumption. We propose a method to estimate the effect of the electric field polarization and temperature on the electrical properties of different types of synthesized porous anodic aluminium oxide membranes. It results that the effective permittivity along the pore axis is generally 20% higher than the one in the orthogonal direction. The type of solution and the voltage level applied during anodization are the main parameters affecting the AAO templates characteristics, i.e. their porosity and chemical content. The values of permittivity of the final material, are typically in the range 2.6–3.2 for large pore diameter membranes including phosphorus element and having a low water content, and in the range 3.5–4 for the ones with smaller pores, and showing sulphur element incorporation. Moreover, the dc conductivity of the different membranes appears to be correlated to the pore density.

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