Article ID Journal Published Year Pages File Type
543081 Microelectronic Engineering 2010 4 Pages PDF
Abstract

This paper investigates fabrication of large-area Ag–Pd conductive patterns on ferrite substrate using laser micro-cladding for microwave device application. The effects of the scan line spacing (i.e., beam overlapping factor) on the quality of the fabricated conductive film were studied in detail. Results showed that surface morphologies and electrical characteristics of laser-sintered conductive films were highly dependent on the value of the scan line spacing and the critical beam overlapping factor lay between 20% and 40%.

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