| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 543143 | Microelectronic Engineering | 2010 | 6 Pages |
Abstract
The wearing resistance and corrosion resistance of Ni-W alloy films is more excellent than that of Ni film. As a contrast, wearing resistance and corrosion resistance of Ni and NiW films are investigated in this paper. The results show that electrodeposited amorphous Ni-W alloy films have good wearing resistance and excellent corrosion resistance compared with electrodeposited Ni films. Moreover, the Ni-W alloy films still had good properties after heat treatment. The good wearing resistance and corrosion resistance of amorphous Ni-W alloy films are associated with crystal structure. The micro-spinneret is fabricated successfully with amorphous Ni-W alloys by UV-LIGA technology.
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Authors
Hong Wang, Rui Liu, FengJi Cheng, Ying Cao, GuiFu Ding, XiaoLin Zhao,