| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 543235 | Microelectronic Engineering | 2009 | 6 Pages |
Abstract
High-density ordered arrays of h-PDMS nanopillars were fabricated using an anodic aluminium oxide (AAO) template. The pore diameter and the interpore distance of the replica h-PDMS molding are well consistent with that of AAO template. The inverse h-PDMS has the surface characteristic of hydrophobic and surface energy of 130°. Hexagonally arranged array can be obtained by UV-nanoimprint lithography using our proposed h-PDMS mold, and their morphologies can be transferred truly. Besides, the h-PDMS mold has been used to fabricate photonic crystal structure on GaN by nanoimprint process, which could be found an application in the light output of GaN LED.
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Authors
Weimin Zhou, Xiaoming Niu, Guoquan Min, Zhitang Song, Jing Zhang, Yanbo Liu, Xiaoli Li, Jianping Zhang, Songling Feng,