Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition

Bimorph nano actuators synthesized by a two-layer focused ion beam (FIB) chemical vapor deposition (CVD) process have been demonstrated. The core bimorph segment of the actuator is a column structure made of two 200-nm thick tungsten-based-conductor (TBC) and diamond-like-carbon (DLC) layers. Several segments can be connected together of different angles to construct actuators with various moving capabilities when joule heating is applied via silicon MEMS (Microelectromechanical System) heater as the actuation source. Experimentally, a prototype five-segment actuator has shown projection displacement of 600 ± 60 nm under an input power of 1.02 W (160 mA and 6.41 V). The actuator has been repeatedly operated for over 100 times without any indication of degradation. As such, this work represents a new class of nano actuators based on versatile and flexible FIB-CVD bimorph nanostructures.