Article ID Journal Published Year Pages File Type
543349 Microelectronic Engineering 2009 6 Pages PDF
Abstract

In this paper, we propose an efficient microfluidic fabrication process for Lab-on-Chip (LoC) applications. This low temperature process is employed to implement different microfluidic components including microchannels, microvalves as well as microfluidic packaging of CMOS chips. Furthermore, we describe the applicability of this direct-write microfluidic fabrication process (DWFP) for LoCs by demonstrating the experimental results of a thermally-actuated microvalve incorporated with a capacitive sensor.

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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