Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
543439 | Microelectronic Engineering | 2009 | 4 Pages |
Abstract
Hafnium dioxide has been recently introduced as a gate dielectric in the field effect transistors. It belongs to a class of high dielectric constant or high-k dielectrics. We briefly discuss the structural and electronic properties of bulk hafnia, and show how oxygen vacancies believed to affect the band alignment across the metal oxide semiconductor (MOS) stack are stabilized in hafnia films next to high work function metals.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Alexander A. Demkov, O. Sharia, X. Luo, G. Bersuker, J. Robertson,