Article ID Journal Published Year Pages File Type
543562 Microelectronic Engineering 2008 9 Pages PDF
Abstract

This paper reports a simple and novel process that allows the fabrication of suspended channel MEMS devices. Two basic types of suspended structures were fabricated using the new process, and a possible functionalization mechanism for bio-analytical detection and sensing using spotting and capillary action was successfully tested.Possible uses of the fabricated structures are described, as specific existing types of biochemical MEMS sensors.

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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