Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
543562 | Microelectronic Engineering | 2008 | 9 Pages |
Abstract
This paper reports a simple and novel process that allows the fabrication of suspended channel MEMS devices. Two basic types of suspended structures were fabricated using the new process, and a possible functionalization mechanism for bio-analytical detection and sensing using spotting and capillary action was successfully tested.Possible uses of the fabricated structures are described, as specific existing types of biochemical MEMS sensors.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Alexander Vladimirov Grigorov,