| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 543759 | Microelectronic Engineering | 2008 | 4 Pages |
Abstract
This paper presents the topology optimized design procedure and fabrication of electrothermal polysilicon microgrippers for nanomanipulation purposes. Performance of the optimized microactuators is compared with a conventional three-beam microactuator design through finite element analysis. The accuracy of the finite element model is verified by comparison of simulated and measured displacement vs. bias voltage curves. A considerable improvement in the mechanical stiffness is indicated by AFM force measurements, being 9 times higher compared to the conventional three-beam actuator.
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Authors
Ozlem Sardan, Dirch H. Petersen, Kristian Mølhave, Ole Sigmund, Peter Bøggild,