Article ID Journal Published Year Pages File Type
543763 Microelectronic Engineering 2008 4 Pages PDF
Abstract

We have fabricated a periodic array of holes with diameters of a few microns on thin metal films on a Si substrate by using lithographic techniques, and demonstrate that the structures show extraordinary transmission in the infrared spectrum. Our structures become efficient narrow-band infrared thermal emitters when the hole pattern is transferred to the Si substrate by dry etching using the metal as a mask. The influence of the geometrical parameters, like the hole depth and diameter, on the emission spectra was considered in order to optimize the optical properties.

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Physical Sciences and Engineering Computer Science Hardware and Architecture
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