Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
543763 | Microelectronic Engineering | 2008 | 4 Pages |
Abstract
We have fabricated a periodic array of holes with diameters of a few microns on thin metal films on a Si substrate by using lithographic techniques, and demonstrate that the structures show extraordinary transmission in the infrared spectrum. Our structures become efficient narrow-band infrared thermal emitters when the hole pattern is transferred to the Si substrate by dry etching using the metal as a mask. The influence of the geometrical parameters, like the hole depth and diameter, on the emission spectra was considered in order to optimize the optical properties.
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Authors
P. Theodoni, P. Bayiati, M. Chatzichristidi, Th. Speliotis, V. Em. Vamvakas, I. Raptis, N. Papanikolaou,