| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 543764 | Microelectronic Engineering | 2008 | 4 Pages |
Abstract
Low power micromachined gas sensors based on suspended micro-hotplates are presented in this work. The sensors were fabricated using Porous Silicon Technology. Two different metal-modified nanostructured sensitive materials were deposited on top of the active area of the micro-hotplates, using the micro-dropping technique: SnO2:Pd and WO3:Cr. For the characterization of both gas sensors, measurements in NH3 ambient took place, in isothermal mode of operation. Improved sensors characteristics were obtained for SnO2:Pd sensors, compared to WO3:Cr, for these operating conditions.
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Authors
R. Triantafyllopoulou, X. Illa, O. Casals, S. Chatzandroulis, C. Tsamis, A. Romano-Rodriguez, J.R. Morante,