| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 543870 | Microelectronic Engineering | 2008 | 5 Pages |
Abstract
In the paper, the method of fabrication of monolithically integrated microfluidic–microoptics systems is presented. Soda-lime glass is used as a substrate material, in which the waveguiding optics is fabricated by means of an ion exchange process, whereas the microfluidic channel is manufactured using reactive ion etching technique. Basic optical characteristics of the device are also reported.
Related Topics
Physical Sciences and Engineering
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Authors
Julien Vieillard, Radoslaw Mazurczyk, Lynda-Lawrence Boum, Aude Bouchard, Yann Chevolot, Pierre Cremillieu, Benjamin Hannes, Stanislas Krawczyk,