Article ID Journal Published Year Pages File Type
543963 Microelectronic Engineering 2007 4 Pages PDF
Abstract

The commonly encountered frequency dispersion and distorted behavior of GaAs and III-V MOS C-V and G-V is clarified by using MOS interface state theory. The relation of the C-V behavior with Fermi-level pinning of III-V MOS is explained. It is shown why it is difficult to quantify the interface state density using the conductance method for III-V MOS. A qualitative distinction of interface state behavior from common frequency dispersion due to series resistance is also put forward and guidelines are given to properly interpret III-V admittance data.

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