High-performance optical waveguide devices using 300 mm Si photonics platform

•The Si photonics platform for 300 mm SOI wafers has been built up.•The propagation loss is less than 0.5 dB/cm at 1.55 μm wavelength for waveguides.•The 50 × 50 mm2 large Si interposers have been demonstrated.•This platform is useful for performance enhancement on the optical integrated circuit

The Si photonics platform for 300 mm SOI wafers has been built up for optical multi-applications. The performance of main optical waveguide devices has been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5 dB/cm at 1.55 μm wavelength for 220 nm-thick single-mode waveguides with TE-polarization. MMI coupler, AWG and WDM filter showed superior performance for their applications. The 50 × 50 mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications.

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