Article ID Journal Published Year Pages File Type
544205 Microelectronic Engineering 2014 4 Pages PDF
Abstract

•A polyimide microfluidic device was developed for X-ray scattering measurements.•A simple lamination process was used to fabricate microfluidic devices.•Optimized fabricated microfeatures allow reducing the X-ray scattering background.•The cell can be used for studying chemical reactions and for biological analysis.

Microfluidics combined with X-ray scattering techniques allows probing conformational changes or assembly processes of biological materials. Our aim was to develop a highly X-ray transparent microfluidic cell for detecting small variations of X-ray scattering involved in such processes. We describe the fabrication of a polyimide microfluidic device based on a simple, reliable and inexpensive lamination process. The implemented microstructured features result in windows with optimized X-ray transmission. The microfluidic device was characterized by X-ray microbeam scattering at the ID13 beamline of the European Synchrotron Radiation Facility.

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