Control of self-assembly defects in thermal nanoimprint

With residual-free imprint, physical self-assembly of the polymer within partly-filled cavities has to be avoided to ensure the masking capability of nanoimprint when used as a lithography technique. In this regard we investigate the impact of the velocity of pressure application by use of a motor-driven imprint system. Slowing-down the velocity of pressure application maintains a smooth surface of the polymeric layer in the cavities, minimizing the risk of local contact between polymer and stamp with moderate filling levels of the cavities. At a high filling level of the cavities, the formation of self-assembly cannot be avoided, as van der Waals interactions between polymer surface and stamp become effective to drive the formation of instabilities. The experimental results obtained can be understood by stability analysis. Understanding of the processes leading to the formation of physical self-assembly is vital to exploit the full potential of nanoimprint for processing.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► Control of physical self-assembly by the intrusion velocity of the stamp. ► Slow imprint smoothens polymer surface. ► Instability analysis including stamp height.