Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
544292 | Microelectronic Engineering | 2013 | 4 Pages |
We present an effective method to assemble the PSs in specified regions by hydrophiling the substrate in designed regions for the nanophotonics with nanostructures in well-definite regions. A hydrophilic positioning template which carries designed metal structures is prepared by lithography according to the specified requirement. Following that, the structured metal surface is treated to be hydrophobic by a 184 polydimethylsiloxane (PDMS) membrane. After self-assembly and metal lift-off process, the PSs can be assembled only in the well-defined pattern regions. The corresponding experiments were performed and PSs were assembled in the different shapes regions.
Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► An effective method to assemble the PSs in specified regions was presented. ► Substrate was treated to be hydrophilic only in the designed regions by pattern protecting the outside regions. ► PSs were assembled in variety of shaped regions. ► The application field of self-assembly method was extends.