Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
544299 | Microelectronic Engineering | 2013 | 5 Pages |
This study presents the micromachining of CuInxGa(1−x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.
Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► Three thin films of CIGS PV modules can be fabricated by one-time scribing technique of ultrafast laser irradiation. ► No melting exists on the scribing edges after ultrafast laser micromachining. ► The results reveal this process removal of ZnO, CIGS, and Mo layer without residuals. ► Ultrafast laser scribing process of CIGS PV modules can achieve good quality.