| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 544315 | Microelectronic Engineering | 2013 | 4 Pages |
Abstract
- We report a novel method for the fabrication of PDMS microfluidics interconnects.
- SU-8 thin and thick processes are used to fabricate one step tubing interconnects.
- PDMS nanocomposite was specially developed for easy dry etching of residual layer.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Adrian MartÃnez-Rivas, Laurent Mazenq, Laurent Jalabert, Xavier Dollat, Christophe Vieu, Childérick Séverac,