Micromachined self-actuated piezoresistive cantilever for high speed SPM

This paper presents high resonance frequency (∼400–1000 kHz) thermally actuated piezoresistive cantilevers for scanning probe microscopy (SPM). A novel technological fabrication process for the cantilever is presented. Theoretical calculations and simulations using the finite element method (FEM) are done to optimize the mechanical as well as the thermal properties. We investigate the cantilever’s dynamics, the actuation and sensing mechanism, keeping focus on electrical crosstalk between sensor and actuator. High-speed imaging with a fast x-y scanning stage combined with a custom build AFM controller shows the potential of the cantilever. Images with scan rates up to one image per second are obtained.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► We designed high resonance frequency self- actuated piezoresistive cantilever for SPM. ► Arrangements for sensor actuator crosstalk suppression were introduced. ► The technological process flow is presented. ► First images were obtained with the new cantilever.