Fabrication of MEMS actuators from the BEOL of a 0.25 μm BiCMOS technology platform

A fabrication process of ultrathin TiN micro-electromechanical systems (MEMS) actuators intended for applications in electrostatic actuator schemes is presented. It includes the preparation of the TiN layer from the back end of line (BEOL) module of a 0.25 μm bipolar complementary metal oxide semiconductor (BiCMOS) technology. Furthermore, the processes of releasing and stiction-free drying of fabricated actuators are demonstrated. Means to solve underlying problems of the fabrication process as well as perspectives for applications are analyzed and discussed in detail.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► Preparation of monolithic integrated 50 nm thin TiN actuator. ► Using a standard BEOL module of a 0.25 BiCMOS technology. ► Introducing a new platform for Bio-MEMS.