| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 544390 | Microelectronic Engineering | 2012 | 4 Pages |
This work mainly focuses on the development of germanium-based thin-film piezoresistive strain gauges on thin NiTi and stainless steel cylinders. These microgauges enable the real-time measurement of the cylinder’s strain distribution from which its deflection status can be deduced, based on an analytical mechanical model of thin cantilever beams. The adaptation of thin cylinders to typical micromachining equipment requires several adjustments in preparation works. The fabrication process of germanium microgauges also has to be adjusted according to the particularities of metal substrates. A number of polycrystalline germanium strain microgauges of various dimensions are implemented on thin cylinders. The results of the fabrication process are presented. The existing constraints of the current process and the potential improvement measures are then discussed.
Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► Germanium piezoresistive strain microgauges are implemented on thin cylinders. ► A stainless steel circular support is used to resolve equipment compatibility problems. ► Thin gold film serves to lower the crystallization temperature of germanium. ► Low-temperature micromachining process is executed on metal substrates.
