A novel volumetric silicon micropump with integrated sensors

We present a novel peristaltic micropump based on piezoelectric actuation and active valves that combines high fluidic performances of a volumetric pump and the integration of sensors. The latter are localized directly on the membranes that consequently are used for pumping as well as for sensing. This achievement was possible thanks to an original fabrication process based on a SOI (Silicon On Insulator) wafer, enabling additional MEMS technological steps such as photolithography or ion implantation to be performed on the membranes.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► We present a novel silicon micropump integrating piezoresistive sensors. ► An original fabrication process allows MEMS technological steps on the membranes. ► The micropump is truly volumetric and has state-of-the-art fluidic performances. ► The sensors monitor in real time the deformation of the membranes and the pressures. ► The sensors allow for a better control over the micropump functioning and delivery.