| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 544500 | Microelectronic Engineering | 2011 | 4 Pages |
Abstract
Thin film bulk acoustic resonators (FBARs) have been directly integrated on liquid crystal polymer (LCP) substrates for application to the field of flexible electronics. Particular developments required were chemo-mechanical polishing for LCP roughness reduction to enable growth of high quality ZnO films and a through substrate deep reactive ion etch process. Q values of up to 126 and 78 for series and parallel resonances combined with an electromechanical coefficient (kt2) ∼ 6.7% were achieved. Further device development is needed but this performance is already sufficient for some chemical/biological sensing applications.
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Hardware and Architecture
Authors
R.V. Wright, G. Hakemi, P.B. Kirby,