Article ID Journal Published Year Pages File Type
544507 Microelectronic Engineering 2011 5 Pages PDF
Abstract

In this study, V2O4–PEPC based pressure sensor was designed and fabricated by drop-casting the blend of V2O4–PEPC microcomposite thin films of vanadium oxide (V2O4) micropowder (10 wt.%) and poly-N-epoxypropylcarbazole, PEPC (2 wt.%) in benzol (1 ml) on steel substrates. The thickness of the V2O4–PEPC films was in the range of 20–40 μm. The DC resistance of the sensor was decreased in average by 24 times as the pressure was increased up to 11.7 kNm−2. The resistance–pressure relationships were simulated.

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