Characteristics of eco-friendly synthesized SiO2 dielectric nanoparticles printed on Si substrate

We developed an eco-friendly method for manufacturing SiO2 nanoparticles and, thereby, SiO2 ink to be used in the digital printing process for the fabrication of SiO2 film. The synthesized SiO2 nanoparticles were dispersed in an organic solvent with additives to make a SiO2 ink for feasibility testing. For the dispersion of the nanoparticles, two kinds of dispersing agents were employed and compared, e.g., Polyvinylpyrrolidone (PVP) and hydroxypropylcellulose (HPC). From the dispersion testing with the two agents, the HPC was considered to be more suitable for the dispersion of the SiO2 nanoparticles synthesized in this study. Then, an attempt was made to fabricate a printed SiO2 film on a Si substrate to see whether the SiO2 nanoparticles can be used for printing or not. The insulation resistance and dielectric constant of the SiO2 powders were also measured and found to be reasonable for the use as an insulation layer for passivation. Finally, the electrical losses were measured under high frequencies to evaluate the feasibility of the SiO2 ink for various high frequency applications.