| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 544809 | Microelectronic Engineering | 2010 | 5 Pages |
Abstract
We introduce a novel method for fabricating nanocones of various metals. Based on a combination of UV-nanoimprint lithography and electron beam evaporation, the method enables fast, high volume, and reproducible fabrication of conical nanostructures on flat substrates. We investigate cone formation with eight different metals and find that the shape of the cone depends on the material characteristics of the deposited metal.
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Authors
Juha M. Kontio, Janne Simonen, Juha Tommila, Markus Pessa,