| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 544814 | Microelectronic Engineering | 2010 | 6 Pages |
Abstract
The anodic bonding between glass–ceramics and stainless steel (No. 430#) which was coated with SiO2 layer were investigated. The SiO2 layers with thickness comprised between 150 and 250 nm were coated on stainless steel surfaces by sol–gel method, the bonding process was achieved at 350 °C and 800 V for 45 min under atmosphere. The micro-topography and the compositions of the bonding interfaces were investigated by XRD, SEM and EDS. The results indicated SiO2 layers could help the formation of the bonding with glass–ceramics to stainless steel, lithium iron oxide (LiFeO2) was observed on the surface of glass–ceramics after bonding, and the bonding strength increased with increasing bonding temperature or voltage.
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Authors
Dehua Xiong, Jinshu Cheng, Hong Li, Wei Deng, Kai Ye,