Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
544844 | Microelectronic Engineering | 2010 | 6 Pages |
Abstract
A new printing technology is described, which is capable of printing metallic electrodes onto organic layers. Electrodes are defined on top of a sacrificial layer by optical or nano-imprint lithography. To increase the stability of the process the electrodes are coated with several backing layers. The metallic features are released from the sacrificial layer by immersion in water and subsequently transferred onto the target substrate. By the use of nano-imprint lithography, feature sizes below 100 nm are achieved. The strengths of the printing technology are high integration density, versatility and reproducibility.
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Authors
Björn Lüssem, Zoi Karipidou, Akos Schreiber, Akio Yasuda, Jurina M. Wessels, Gabriele Nelles,