| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 544898 | Microelectronic Engineering | 2009 | 4 Pages |
Abstract
Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate.
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Authors
Sung-Hoon Hong, Jae-Yeon Hwang, Heon Lee, Hee-Chul Lee, Kyung-Woo Choi,