| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 544905 | Microelectronic Engineering | 2009 | 5 Pages |
Recent market studies mention the necessity to include sensors in the design of organic electronic devices in order to broaden the range of applications. It is therefore essential to identify potential organic mechanical sensor materials and to develop processes and methods to structure them and characterize their piezoresistive properties. Furthermore, it is also essential for organic electronic devices to know the change of resistance upon bending of flexible substrates. A material widely used in organic electronics is the complex of the intrinsically conductive polymer poly(3,4-ethylenedioxythiophene) and polystyrene sulfonate acid (PEDOT/PSS). In this paper first the fabrication of a polyimide (PI) membrane with integrated PEDOT/PSS strain gauges is presented. Upon a pressure difference the membrane is deflected and the resulting changes in resistance of the sensor elements are recorded. By applying a membrane mechanics model the resistance changes can be linked to the strain in the membrane and then the plane strain gauge factor kPSkPS for PEDOT/PSS of 0.48±0.070.48±0.07 at 36.6±336.6±3% rH can be determined.
