Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
545272 | Microelectronic Engineering | 2006 | 5 Pages |
Abstract
In this case, our groups presented various optical structures through the presented method, involving concave surface forming and soft replica molding. The method of concave surface forming is mainly for the fabrication of concave surface. The method of soft replica molding is mainly for the fabrication of replica. Concave and convex relief structures, including circular curved relief structures, convex relief structures with platform structures on the top, refractive beam-shaping elements, these structures with dual curvatures and asymmetric structures, can be easily made through the presented method, respectively. All processes of manufacture are in several simple steps without multistep optical lithography and complex masks.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Teng-Kai Shih, Chia-Fu Chen, Jeng-Rong Ho, Fang-Tzu Chuang,