| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 545275 | Microelectronic Engineering | 2006 | 7 Pages |
Abstract
We fabricated nickel-shims including various types of structures with dimensions from hundreds of nanometers to several microns. The mastering process was made by electron-beam lithography, lift-off and reactive ion etching techniques. Then the structures were copied into a UV-curable ORMOCER-material and the Ni-shims were fabricated by electroforming using UV-copies as masters. The experiments showed that the use of UV-copying evades typical quartz master sticking and cracking problems. Furthermore, all features were replicated in the final Ni-shim as they existed in the quartz master proving the method suitable for the fabrication of the Ni-shims from the quartz masters with high precision.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Juha Pietarinen, Samuli Siitonen, Noora Tossavainen, Janne Laukkanen, Markku Kuittinen,