| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6942370 | Microelectronic Engineering | 2018 | 6 Pages |
Abstract
Packaging and filtration is critical for photonic gas sensors as they are vulnerable to contaminations of dust and moisture in the ambient air. In this work, we present a prototype of packaging using nano-porous anodized aluminum oxide (AAO) as filtration interface for an optical CO2 gas sensor based on evanescent fields of silicon waveguides. An acrylate-type package housing for the AAO membrane was designed, manufactured and assembled via implementing additive manufacturing technologies including 3D-printing and inkjet printing. Simulation and experimental results for the corresponding package shows a minimal influence of response time while providing a significant filtration performance.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Ying Ma, Jaroslaw Kaczynski, Christian Ranacher, Ali Roshanghias, Markus Zauner, Banafsheh Abasahl,