Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6942386 | Microelectronic Engineering | 2018 | 34 Pages |
Abstract
Approaches for processing a brittle SiO2 layer in a stable manner allow its feasible use as a transparent flexible electronic device substrate. Introduction of a sacrificial GeOx layer and SU-8 anchors provides both thermally and mechanically secure fabrication as well as printable formats to allow the “stick-and-play” system on a desired surface.162
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Jung Il Yoo, Hun Soo Jang, Juhwan Jang, Jongwon Yoon, Oh. Young Kwon, Jong Jun Park, Sang Myeong Kang, Tae Jin Yoo, Seung Hyun Kim, Byoung Hun Lee, Sung-Hoon Choa, Heung Cho Ko,