Article ID Journal Published Year Pages File Type
6942386 Microelectronic Engineering 2018 34 Pages PDF
Abstract
Approaches for processing a brittle SiO2 layer in a stable manner allow its feasible use as a transparent flexible electronic device substrate. Introduction of a sacrificial GeOx layer and SU-8 anchors provides both thermally and mechanically secure fabrication as well as printable formats to allow the “stick-and-play” system on a desired surface.162
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Authors
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