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Fabrication of a stretchable transparent electrode with jagged grid structure using silver ink

Article ID Journal Published Year Pages File Type
6942496 Microelectronic Engineering 2018 31 Pages PDF
Keywords
ICPEBLNILSilver inkUltravioletStretchable electrodeIndium tin oxideITORadio frequencyElectron-beam lithographyNanoimprint lithographySEMScanning electron microscopyElectron beaminductively coupled plasma
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Preview
Fabrication of a stretchable transparent electrode with jagged grid structure using silver ink
Authors
Naoyuki Sato, Jun Taniguchi,
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Journal
Microelectronic Engineering
Journal: Microelectronic Engineering
Related Categories
ICP
EBL
NIL
Silver ink
Ultraviolet
Stretchable electrode
Indium tin oxide
ITO
Radio frequency
Electron-beam lithography
Nanoimprint lithography
SEM
Scanning electron microscopy
Electron beam
inductively coupled plasma
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